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/ What is "silicon semiconductor pressure sensor"?
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What is "silicon semiconductor pressure sensor"?
硅半导体传感器属于压阻式传感器,一般分为扩散硅传感器和单晶硅传感器。
在半导体材料中,电阻率改变会引起测量信号发生变化,这些都是因晶体结构中电子移动发生变化而产生的,而电子移动又会受到机械载荷的影响。敏感的硅芯片及过程介质被不锈钢膜片(封装)隔离。根据具体应用要求,石蜡油或硅油可用作导压流体,用于内部压力变送。
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